Rotating Out-of-Plane Micromirror

被引：1

作者：

Oak, Sahil ^{[1
]}

Edmiston, Greg ^{[1
]}

Sivakumar, Ganapathy ^{[1
]}

Ramirez, Gabriel ^{[1
]}

Dallas, Tim ^{[1
]}

机构：

[1] Texas Tech Univ, Dept Elect & Comp Engn, Lubbock, TX 79409 USA

来源：

MOEMS AND MINIATURIZED SYSTEMS IX | 2010年 / 7594卷

关键词：

micromirrors; optical switching; beam steering; ACTUATOR;

D O I：

10.1117/12.842003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel, micro-actuated system for beam steering or optical multiplexing applications. The system consists of polysilicon micromirror which is held at similar to 45 degrees angle on a gear which has a rotational freedom of 360 degrees. In this work, we use serpentine springs attached to a mirror with position specific "catch blocks" to hold the mirror at a desired angle on top of a rotating gear. Out-of-plane assembly is achieved using a simple, post-processing procedure. The mirror platform is driven by an electrostatically actuated rotary drive. The mirror was tested for robustness and optical performance. Good correlation was found between experiment and various simulations.

引用

页数：4

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