Shifted-phase calibration for a 3-D shape measurement system based on orthogonal composite grating projection

被引:4
|
作者
He, Yuhang [1 ]
Cao, Yiping [1 ]
机构
[1] Sichuan Univ, Dept Optoelect, Chengdu 610065, Sichuan, Peoples R China
来源
OPTIK | 2011年 / 122卷 / 19期
关键词
3-D measurement; Improve accuracy; Composite grating; Sinusoidal fringe; Spectrum overlapping; MEASURING PROFILOMETRY;
D O I
10.1016/j.ijleo.2010.10.033
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This paper proposes a novel method for reducing measurement error caused by spectrum overlapping in orthogonal-composite-grating-based 3-D measurement method. For 3-D measurement systems based on orthogonal composite grating projection, spectrum overlapping causes phase of each deformed phase-shifting fringe changed differently, which violates the principle that the shifted phases between adjacent deformed fringes must be equivalent to 2 pi/3, and therefore results in phase measurement error. The proposed shifted-phase calibration method is based on that phase variation of each deformed fringe is independent of height and reflectivity of the measured object. Three composite gratings are projected on the reference plane, and each carrier channel includes three phase-shifting gratings needed in phase measuring profilometry (PMP). Because the adjacent phase-shifting fringes demodulated from the same carrier channel have the phase difference of 2 pi/3, we can respectively calculate the reference plane's phases of three carrier channels by the phase algorithm of PMP method, and the shifted phases between them are obtained. When an object is measured, the shifted phases between deformed phase-shifting fringes can be calibrated. A new 3-D measurement mathematical model is set to reconstruct object. Our experiments prove that the proposed method can effectively restrain the effect of spectrum overlapping and improve measurement accuracy almost one times. (C) 2010 Elsevier GmbH. All rights reserved.
引用
收藏
页码:1730 / 1734
页数:5
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