Using product test data for manufacturing process control

被引:0
|
作者
Spitzlsperger, Gerhard [1 ]
Frick, Matthias [1 ]
Rathei, Dieter [2 ]
机构
[1] Renesas Semicond Europe Landshut GmbH, Jenaer Str 1, D-84034 Landshut, Germany
[2] DR YIELD Software & Solut GmbH, A-8010 Graz, Austria
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new software tool, YieldWatchDog (TM), for monitoring all electrical test parameters was evaluated. The scope of this tool is to control all electrical test parameters and to detect early warning signals for yield degradation. Although no yield degradation occurred during the evaluation time period, the usefulness of the tool could be demonstrated using historical data.
引用
收藏
页码:368 / +
页数:2
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