A microfabricated solid-state secondary Li battery

A thin-film solid-state Li/TiS2 microbattery has been developed at Eveready Battery Company (EBC). It is fabricated using sputtering for deposition of the contacts, TiS2 cathode, and glassy electrolyte. High vacuum evaporation is used to deposit a LiI layer and Li anode. The outstanding secondary performance with thousands of deep discharges, the capability of current density, as high as several mA/cm(2) and the long term stability both on-shelf and during cycling make the EBC Microbattery superior to any other microbattery reported to date.