Cleaning Practices for the National Ignition Facility (NIF)

被引：16

作者：

Pryatel, James A. ^{[1
]}

Gourdin, William H. ^{[2
]}

Frieders, Susan C. ^{[2
]}

Ruble, Gerald S. ^{[2
]}

Monticelli, Marcus V. ^{[2
]}

机构：

[1] Akima Infrastruct Serv, 7000 East Ave, Livermore, CA 94550 USA

[2] Lawrence Livermore Natl Lab, Livermore, CA 94550 USA

来源：

LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2014 | 2014年 / 9237卷

关键词：

Cleaning; cleanliness; contamination; particles; VOCs; AMCs; damage; clean room; optics; residue; NVRs;

D O I：

10.1117/12.2075927

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We describe the cleaning processes, treatment methods, facilities, and cleanliness verification techniques developed to achieve and maintain the demanding cleanliness requirements for both hardware and optics used in the National Ignition Facility (NIF).

引用

页数：21

共 50 条

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