Plasma etching of nano-structured precursor-derived ceramic composites

被引：0
|
作者：
Lee, SH [1 ]
Aldinger, F
机构：
[1] Univ Stuttgart, Max Planck Inst Met Forsch, Pulvermet Lab, D-70569 Stuttgart, Germany
[2] Univ Stuttgart, Inst Nichtmet Anorgan Mat, Pulvermet Lab, D-70569 Stuttgart, Germany
来源：
JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 2005年 / 88卷 / 11期
关键词：
D O I：
10.1111/j.1551-2916.2005.00537.x
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper reports on the analysis of the microstructure of precursor-derived ceramics by plasma etching and field emission scanning electron microscopy. By applying this technique, the nano-crystals in Si-C-N-based ceramics and composites can be clearly observed without difficulty.
引用
收藏
页码：3207 / 3210
页数：4
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