Next generation adaptive optics: a low-voltage ASIC driver for MEMS deformable mirrors

被引：0
|
作者：
Ross, Colin [1 ]
Chapman, Scott [1 ]
El-Sankary, Kamal [1 ]
Shafai, Cyrus [2 ]
Burley, Greg [3 ]
Zhou, Yu [2 ]
Park, Byoungyoul [2 ]
机构：
[1] Dalhousie Univ, Halifax, NS B3H 4R2, Canada
[2] Univ Manitoba, Winnipeg, MB R3T 5V6, Canada
[3] NRC Hertzberg Astron & Astrophys, Victoria, BC V9E 2E, Canada
来源：
ADAPTIVE OPTICS SYSTEMS VI | 2018年 / 10703卷
基金：
加拿大自然科学与工程研究理事会;
关键词：
Deformable mirror; adaptive Optics; DM ASIC driver; MEMS;
D O I：
10.1117/12.2314256
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We report on a new generation of deformable mirror driver electronics that use application specific integrated circuit (ASIC) technology for integration with low-voltage (similar to 20 V) microelectromechanical (MEMS) deformable mirrors. The ASIC is designed and manufactured using a CMOS foundry to address the power consumption and signal routing complexity issues inherent to conventional drive electronics. A prototype 9-channel driver capable of producing a bipolar (+/-15 V) output signal has been designed and sent for fabrication. Simulation results and preliminary integration avenues for a fully packaged ASIC/MEMS device that exploit increasingly popular trends in the semiconductor industry will also be presented.
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页数：9
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