Molecular dynamics, Monte Carlo and their hybrid methods: applications to thin film growth dynamics

被引:2
|
作者
Takano, J
Takai, O
Kogure, Y
Doyama, M [1 ]
机构
[1] Teikyo Univ Sci & Technol, Dept Mat, Yamanashi 4090193, Japan
[2] Nagoya Univ, Dept Mat Proc Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
关键词
atomic scale dynamics; epitaxial growth; crystal growth process; arbitrary temperature;
D O I
10.1016/S0040-6090(98)01146-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Atomic scale dynamics of thin film growth onto gold (111) and copper (111) surfaces are investigated by means of molecular dynamics (MD) and Monte Carlo (MC) computer simulations. At first, the MD simulation is applied to kink growth, the motion of a ledge adatom to go down the step. Next, the MC simulation is performed to show that a slow growth process forms a dense film and a fast growth process obtains a film which contains many defects. Finally, we combine the results of the MD and the MC simulations which makes it possible to show the figure of crystal growth process based on probability at an arbitrary temperature. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:209 / 213
页数:5
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