Microstructure of ion-irradiated GaN and its thermal evolution

被引：0
|
作者：
Bae, In-Tae [1 ]
Jiang, Weilin [2 ]
Zhang, Yanwen [2 ]
Weber, William J. [2 ]
Wang, Chongmin [2 ]
机构：
[1] SUNY Binghamton, Small Scale Syst Integrat & Packaging Ctr, Binghamton, NY 13902 USA
[2] Pacific NW Natl Lab, Richland, WA 99352 USA
来源：
MICROSCOPY AND MICROANALYSIS | 2009年 / 15卷
关键词：
IMPLANTATION;
D O I：
10.1017/S1431927609092046
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：1364 / 1365
页数：2
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