Measurement of fogging electrons present in scanning electron microscope specimen chamber

被引：0

作者：

Morimoto, Kentaro ^{[1
]}

Ito, Yuka ^{[1
]}

Gauvin, Raynald ^{[2
]}

Kotera, Masatoshi ^{[1
]}

机构：

[1] Osaka Inst Technol, Major Elect Elect & Mech Engn, Asahi Ku, Osaka 5358585, Japan

[2] McGill Univ, Dept Min & Mat Engn, Montreal, PQ H3A 0C5, Canada

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2020年 / 59卷

关键词：

MONTE-CARLO-SIMULATION; REDUCTION; RESIST;

D O I：

10.35848/1347-4065/ab7f58

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The purpose of this study is (1) to quantify the influence of fogging electrons (FGEs), and (2) to find the conditions for reducing the amount in the vacuum specimen chamber of the electron beam instruments. FGEs are generated on the surface of both the specimen and objective lens electrode and flies within the working distance. When a 100 mm sized copper electrode is used as a specimen and a bias voltage of -200 to +200 V is applied to the specimen, the electron current flowing through the specimen or grounded objective lens electrode is measured with a pico-ammeter. The characteristics of FGEs can be interpreted by electron trajectory simulation. The FGE current at the specimen is minimal when the objective electrode is made of carbon, compared to when the electrode is made of aluminum, copper or stainless steel (SUS304). (c) 2020 The Japan Society of Applied Physics

引用

页数：8

共 50 条

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