X-ray reflectivity imager with 15 W power X-ray source

X-ray reflectivity is usually used for the routine analysis of layered structures of uniform thin films. So far, the technique has some limitations in the application to more practical inhomogeneous/patterned samples. X-ray reflectivity imaging is recently developed technique and can give the reconstructed image from many X-ray reflection projections. The present article gives the instrumental details of the compact X-ray reflectivity imager. Though the power of X-ray source is only 15W, it works well. The calibration of the system has been discussed, because it is particularly important for the present grazing incidence geometry. We also give a visualization example of the buried interface, physical meaning of the reconstructed image, and discussions about possibilities for improvement. Published by AIP Publishing.