Hysteresis loops characteristics of Bi4Ti3O12 ferroelectric thin films with different configuration on Si substrates

被引:0
|
作者
Wang, H [1 ]
机构
[1] Guilin Univ Elect Technol, Dept Commun & Informat Engn, Guilin 541004, Peoples R China
关键词
ferroelectric thin films; P-Vhysteresis loops characteristics; sol-gel method;
D O I
暂无
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In order to fabricate high quality ferroelectric thin films qualified for ferroelectric memories, different ferroelectric thin film systems, with the structures of MFM and MFS, were deposited by using the sol-gel technique. The ferroelectric properties and the P - V hysteresis loops characteristics of these different ferroelectric thin film systems were analyzed with comparison. Based on the test results, a new practicable configuration of Ag/Pb(Zr0.52Ti0.48)O-3/ Bi4Ti3O12/PSi was fabricated, which can improve the ferroelectric properties and hysteresis loops characteristics of the ferroelectric thin films.
引用
收藏
页码:153 / 158
页数:6
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