4-Point-Bending Characterization of Interfacial Adhesion Strength of Co-Zr-Ta and Co-Zr-Ta Variant Thin-Film Stacks

被引：0

作者：

Zhu, Xintong ^{[1
]}

Li, Xiaoxuan ^{[1
]}

Nistala, Ramesh Rao ^{[1
]}

Ali, Zishan ^{[2
]}

Peng, Lulu ^{[3
]}

Selvaraj, Lawrence ^{[2
]}

Cheng, Chor Shu ^{[2
]}

Mo, Zhi Qiang ^{[1
]}

机构：

[1] GLOBALFOUNDRIES Singapore Pte Ltd, QRA MF Dept, 60 Woodlands Ind Pk D,St 2, Singapore 738406, Singapore

[2] GLOBALFOUNDRIES Singapore Pte Ltd, Technol Dev, 60 Woodlands Ind Pk D,St 2, Singapore 738406, Singapore

[3] GLOBALFOUNDRIES Singapore Pte Ltd, NVM & Specialty Projects, 60 Woodlands Ind Pk D,St 2, Singapore 738406, Singapore

来源：

2019 IEEE 26TH INTERNATIONAL SYMPOSIUM ON PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA) | 2019年

关键词：

Adhesion; CZT; 4-Point-Bending;

D O I：

10.1109/ipfa47161.2019.8984815

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this study, soft magnetic thin films including Co-Zr-Ta (CZT) and its variant are deposited on TEOS SiO2 and polyimide to characterize the interfacial adhesion strength of the full magnetic stack using the 4-Point-Bending (4PB) technique. Variation in critical load value Gc, an indicator of the interfacial adhesion strength, is observed. Auger Electron Spectroscopy (AES) is performed for elemental analysis to confirm the interface of de-lamination.

引用

页数：4

共 9 条

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