Modeling and Simulation of Flexible Vector Shear Flow Sensor Based on COMSOL Multiphysics

被引：1
|
作者：
Liu, Guochang [1 ]
Cao, Wenping [1 ]
Tan, Haoyu [1 ]
Wang, Renxin [1 ]
Zhang, Wendong [1 ]
机构：
[1] North Univ China, State Key Lab Testing Technol, Taiyuan 030051, Peoples R China
来源：
2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2021年
基金：
中国国家自然科学基金;
关键词：
TEMPLATES;
D O I：
10.1109/NEMS51815.2021.9451280
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Three-dimensional MEMS devices, which provide a mechanical response with high strain deformation, have been widely used in flexible electronics due to their excellent properties. In this paper, we introduce a kind of stretchable flexible buckling crossbeam-cilia Vector shear flow sensor. The transient model of shear flow signal simulation was established through COMSOL Multiphysics soft, a multi-physics coupling simulation software. The voltage signal output ratio of the sensor X channel and Y channel is as high as 0.44%, so it has good directivity, and the velocity sensitivity is as high as 6.4x10(-3) Vms(2)/kg. It has laid a foundation for the manufacture and application of sensors and opened up a new road for ocean exploration.
引用
收藏
页码：770 / 774
页数：5
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