Noise-induced chaos in the electrostatically actuated MEMS resonators

被引：55
|
作者：
Zhang, Wen-Ming [1 ,2 ]
Tabata, Osamu [2 ]
Tsuchiya, Toshiyuki [2 ]
Meng, Guang [1 ]
机构：
[1] Shanghai Jiao Tong Univ, State Key Lab Mech Syst & Vibrat, Sch Mech Engn, Shanghai 200240, Peoples R China
[2] Kyoto Univ, Dept Microengn, Grad Sch Engn, Kyoto 6068501, Japan
来源：
PHYSICS LETTERS A | 2011年 / 375卷 / 32期
基金：
美国国家科学基金会; 日本学术振兴会;
关键词：
MEMS; Resonator; Electrostatic actuation; Bounded noise; Chaos; MICROELECTROMECHANICAL SYSTEM; PARAMETRIC AMPLIFICATION; BOUNDED NOISE; SIMULATIONS; RESONANCES; MOTION;
D O I：
10.1016/j.physleta.2011.06.020
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
In this Letter, nonlinear dynamic and chaotic behaviors of electrostatically actuated MEMS resonators subjected to random disturbance are investigated analytically and numerically. A reduced-order model, which includes nonlinear geometric and electrostatic effects as well as random disturbance, for the resonator is developed. The necessary conditions for the rising of chaos in the stochastic system are obtained using random Melnikov approach. The results indicate that very rich random quasi-periodic and chaotic motions occur in the resonator system. The threshold of bounded noise amplitude for the onset of chaos in the resonator system increases as the noise intensity increases. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：2903 / 2910
页数：8
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