AC and DC voltage standards based on silicon micromechanics

被引：30

作者：

Suhonen, M ^{[1
]}

Seppa, H ^{[1
]}

Oja, AS ^{[1
]}

Heinila, M ^{[1
]}

Nakki, I ^{[1
]}

机构：

[1] VTT Automat, Espoo 02044, Finland

来源：

1998 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS DIGEST | 1998年

关键词：

D O I：

10.1109/CPEM.1998.699739

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applications are described. The standards are based on controlling the charge of a parallel-moving-plate capacitor. We expect that the voltage standards based on mechanical and geometrical properties of single crystalline silicon can have a high stability. We show the basic principle of the AC and DC standards and preliminary experiments with the AC voltage standard.

引用

页码：23 / 24

页数：2

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