Optical design and implementation of a multi-functional miniature interferometer

被引：0
|
作者：
Lee, CK [1 ]
Wu, GY [1 ]
Wu, WJ [1 ]
Lee, CF [1 ]
Lin, CC [1 ]
Lin, YJ [1 ]
机构：
[1] Natl Taiwan Univ, Inst Appl Mech, Taipei 10764, Taiwan
来源：
INTERNATIONAL OPTICAL DESIGN CONFERENCE 1998 | 1998年 / 3482卷
关键词：
D O I：
10.1117/12.322053
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The design of a newly developed interferometer is described. This interferometer possesses built-in measuring modes such as: (1) absolute vibration, (2) differential vibration, and (3) distance measuring. The circular polarization interferometer configuration, which gives it its compact size and which has a built-in microscopic imaging system, is detailed. In addition, the mechanical layout of the system which guarantees that all alignment functions are orthogonal to each other is also discussed. Various experimental tests were performed to demonstrate the nanometer resolution and megahertz bandwidth capabilities of this new developed interferometer.
引用
收藏
页码：490 / 498
页数：9
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