Columnar structure in porous silicon: influence of etching time on pore dynamics and ordering

被引：4
|
作者：
Nikulin, A. Y. [1 ]
Pelliccia, D. [1 ]
Starkov, V. V. [2 ]
Sakata, O. [3 ]
机构：
[1] Monash Univ, Sch Phys, Ctr Excellence Coherent X Ray Sci, Clayton, Vic 3800, Australia
[2] Russian Acad Sci, Inst Problems Microelect Technol & High Pur Mat, Chernogolovka 142432, Russia
[3] JASRI SPring 8, Mikazuki, Hyogo 6795148, Japan
来源：
JOURNAL OF APPLIED PHYSICS | 2011年 / 109卷 / 07期
基金：
澳大利亚研究理事会;
关键词：
PHOTONIC CRYSTALS; PHASE-RETRIEVAL; RAY; DIFFRACTION;
D O I：
10.1063/1.3561866
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Applications of porous silicon are ranging from drug delivery vehicles to micro fuel cells. The size of the pores and their distribution plays critical role in the final properties of the devices manufactured on their base. We performed nondestructive quantitative experimental studies of selected porous silicon samples with gradient porosity. We were able to determine the average size of the pores and its dynamics as a function of the etching time. We also were able to determine the statistical parameters of the pore formation. (C) 2011 American Institute of Physics. [doi:10.1063/1.3561866]
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页数：3
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