Bonding of glass with femtosecond laser pulses at high repetition rates

被引:116
|
作者
Richter, S. [1 ]
Doering, S. [1 ]
Tuennermann, A. [1 ,2 ]
Nolte, S. [1 ,2 ]
机构
[1] Univ Jena, Inst Appl Phys, D-07743 Jena, Germany
[2] Fraunhofer Inst Appl Opt & Precis Engn, D-07745 Jena, Germany
来源
关键词
TRANSPARENT MATERIALS; TECHNOLOGY; MICROFABRICATION;
D O I
10.1007/s00339-011-6369-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report on the welding of fused silica with ultrashort laser pulses at high repetition rates. Femtosecond laser pulses were focused at the interface of two optically contacted fused silica samples. Due to the nonlinear absorption in the focal volume and heat accumulation of successive pulses, the laser acts as a localized heat source at the focus position. Here, we analyze the influence of the laser and processing parameters on the amount of molten material. Moreover, we determine the achievable breaking stress by a three point bending test. With optimized parameters up to 75% of the breaking stress of the bulk material have been obtained.
引用
收藏
页码:257 / 261
页数:5
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