PECVD prepared SnO2 thin films for ethanol sensors

被引：110
|
作者：
Hellegouarc'h, F [1 ]
Arefi-Khonsari, F [1 ]
Planade, R [1 ]
Amouroux, J [1 ]
机构：
[1] Univ Paris 06, Lab Genie Proc Plasmas & Traitements Surfaces, ENSCP, F-75005 Paris, France
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 73卷 / 01期
关键词：
PECVD; tin oxide; gas sensor;
D O I：
10.1016/S0925-4005(00)00603-1
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
SnO2 thin films are elaborated by a PECVD process in a RF glow discharge reactor. Two kinds of as-deposited films have been studied: unbiased (diode reactor) and biased ones (triode reactor) according to their properties and their response to specific gases such as ethanol. Characterization of the films are carried out by different techniques: FTIR, AES, X-ray diffraction, AFM in order to explain the modifications generated by the bias voltage. The detection results show best sensitivities (S = R-a/R-s) for unbiased films to ethanol at 450 degreesC (S = 45 for 10 ppm). (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：27 / 34
页数：8
相关论文
共 50 条
  • [1] Characterizations of SnO2 and SnO2:Sb thin films prepared by PECVD
    Liu, PY
    Chen, JF
    Sun, WD
    VACUUM, 2004, 76 (01) : 7 - 11
  • [2] Sprayed and thermally evaporated SnO2 thin films for ethanol sensors
    Brousse, T
    Schleich, DM
    SENSORS AND ACTUATORS B-CHEMICAL, 1996, 31 (1-2) : 77 - 79
  • [3] Highly sensitive ethanol sensors based on nanocrystalline SnO2 thin films
    Patil, L. A.
    Shinde, M. D.
    Bari, A. R.
    Deo, V. V.
    CURRENT APPLIED PHYSICS, 2010, 10 (05) : 1249 - 1254
  • [4] Preparation and characterization of nanocrystalline SnO2 thin films by PECVD
    Huang, H
    Tan, OK
    Lee, YC
    Tse, MS
    JOURNAL OF CRYSTAL GROWTH, 2006, 288 (01) : 70 - 74
  • [5] SnO2 and SnO2:Pt thin films used as gas sensors
    Olvera, MD
    Asomoza, R
    SENSORS AND ACTUATORS B-CHEMICAL, 1997, 45 (01) : 49 - 53
  • [6] SnO2 and SnO2:Pt thin films used as gas sensors
    Olvera, M.de la L.
    Asomoza, R.
    Sensors and Actuators, B: Chemical, 1997, B45 (01): : 49 - 53
  • [7] Acetone and Ethanol Sensors Based on Nanocrystalline SnO2 Thin Films with Various Catalysts
    Sevastyanov E.Y.
    Maksimova N.K.
    Khludkova L.S.
    Chernikov E.V.
    Sergeychenko N.V.
    BioNanoScience, 2017, 7 (4) : 654 - 658
  • [8] Characteristics of SnO2 thin films prepared by SILAR
    Yildirim, M. Ali
    Akaltun, Yunus
    Ates, Aytunc
    SOLID STATE SCIENCES, 2012, 14 (09) : 1282 - 1288
  • [9] Room temperature ethanol sensors based on SnO2 films
    Hakhoyan, AP
    Aroutiounian, VM
    Adamian, ZN
    Barseghian, RS
    Dolukhanian, T
    ADVANCED ENVIRONMENTAL SENSING TECHNOLOGY II, 2002, 4576 : 227 - 236
  • [10] Sprayed SnO2 thin films for NO2 sensors
    Ist. Stud. Nuovi Materiali Per l'E., Via Arnesano, 73100, Lecce, Italy
    不详
    不详
    Sens Actuators, B Chem, 1-3 (370-374):
12345