Fabrication of superconducting nanowire single-photon detector

被引：17

作者：

Zhang La-Bao ^{[1
]}

Kang Lin ^{[1
]}

Chen Jian ^{[1
]}

Zhao Qing-Yuan ^{[1
]}

Jia Tao ^{[1
]}

Xu Wei-Wei ^{[1
]}

Cao Chun-Hai ^{[1
]}

Jin Biao-Bing ^{[1
]}

Wu Pei-Heng ^{[1
]}

机构：

[1] Nanjing Univ, Dept Elect Sci & Engn, Nanjing 210093, Peoples R China

来源：

ACTA PHYSICA SINICA | 2011年 / 60卷 / 03期

基金：

中国国家自然科学基金;

关键词：

single photon; niobium nitride; nanowire; detector; QUANTUM KEY DISTRIBUTION; PROTOCOL;

D O I：

10.7498/aps.60.038501

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In this paper, the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors (SNSPD). Besides, the device failure analysis is also introduced. With those methods, we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4. 2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c/s, the detection efficiencies were 20% (660 nm) and 3% (1550 nm) with the SNSPD fabricated with above mentioned methods.

引用

页数：7

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