APCVD-molybdenum oxide thin films: Vibrational and optical properties

被引：8
|
作者：
Gesheva, KA
Ivanova, T
Szekeres, A
Maksimov, A
Zaitzev, S
机构：
[1] Cent Lab Solar Energy & New Energy Sources, Sofia 1784, Bulgaria
[2] Inst Solid State Phys, BU-1784 Sofia, Bulgaria
[3] Inst Solid State Phys, Chernogolovka 142432, Russia
来源：
JOURNAL DE PHYSIQUE IV | 2001年 / 11卷 / PR3期
关键词：
D O I：
10.1051/jp4:20013128
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Molybdenum oxide films were obtained at 200 degreesC by Chemical Vapor Deposition of Mo(CO)(6) at atmospheric pressure and at an optimal ratio of precursor vapors and oxygen. Vibrational and optical properties as dependent on process temperatures were investigated by Raman and Ellipsometric Spectroscopy. The as-deposited films are generally amorphous. A crystallization starts if films are heated at 200 degreesC up to 500 degreesC. Besides the basic Mo-O bands, after annealing a variety of additional vibrational bands was observed. This evidence for polycrystalline structure was also supported by the optical gap energy values found in the range of 2.72-3.63 eV typical for polycrystalline material.
引用
收藏
页码：1023 / 1028
页数：6
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