Principal Component Analysis Augmented Identification of Volatile Organic Compounds Using a Micromachined AT-Cut Quartz Resonator-Based Gas Sensor Array

被引：0

作者：

Zhang, Jiayuan ^{[1
]}

Goel, Nishit ^{[2
]}

Sumaria, Vedant ^{[1
,2
]}

Bart, Stephen ^{[2
]}

Tadigadapa, Srinivas ^{[1
]}

机构：

[1] Northeastern Univ, Dept Elect & Comp Engn, Boston, MA 02115 USA

[2] TDK Invensense Inc, Boston, MA USA

来源：

2021 IEEE SENSORS | 2021年

关键词：

quartz crystal; resonator; bulk acoustic wave; piezoelectric; gas sensor; principal component analysis;

D O I：

10.1109/SENSORS47087.2021.9639787

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we demonstrate the ability of identifying ppm level of concentrations of three volatile organic compounds using micromachined quartz resonators. 100 nm films of functional polymers were deposited on the resonators for the identification of ethanol, acetone, and toluene. Adsorption of gas vapors by the functional polymer films results in resonance frequency shifts of the quartz resonators. Principal component analysis (PCA) was performed on the raw frequency shift data collected. PCA analysis is able to determine components that allow for the gas species identification. Further transformation of these components allows for clustering by concentration.

引用

页数：4

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