Self-consistent model of thermal and ionization non-equilibrium spherical microwave discharge

被引：4
|
作者：
Rafatov, IR [1 ]
Lelevkin, VM
机构：
[1] Middle E Tech Univ, TR-06531 Ankara, Turkey
[2] Kyrgyz Russian Slav Univ, Bishkek 720000, Kyrgyzstan
[3] Amer Univ Cent Asia, Bishkek 720000, Kyrgyzstan
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2005年 / 38卷 / 13期
关键词：
D O I：
10.1088/0022-3727/38/13/022
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A self-consistent model of a spherical microwave discharge is presented. The model takes into account thermal and ionization non-equilibrium of the discharge plasma. We adopt a partial local thermodynamic equilibrium model for the plasma in two-temperature approximation. Numerical experiments are carried out for the discharge in argon at atmospheric pressure. Results are presented for the characteristics of the discharge plasma against the external parameters (the power and frequency of the applied electromagnetic field and the size of the discharge chamber). Presented model results are compared with the results for the ionization equilibrium model of the spherical microwave discharge.
引用
收藏
页码：2227 / 2236
页数：10
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