Nanotechnology and surface analysis using scanning probe microscopy

被引：0
|
作者：
Gunther, E
Kragler, K
机构：
来源：
SIEMENS REVIEW | 1996年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In the field of layer technology processes, the production of well-defined material surfaces is becoming ever more important. Requirements in terms of materials quality are becoming more demanding as smaller and smaller structures and layer thicknesses are introduced. Scanning probe microscopy permits these vital parameters to be determined with a high degree of resolution. In addition, it is becoming a tool for the processing of materials with ultra-fine surface structures.
引用
收藏
页码：2 / 4
页数：3
相关论文
共 50 条
  • [1] Scanning probe Microscopy for Nanotechnology
    Bykov, VA
    [J]. SEVENTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY APPLIED TO SCIENCE, INDUSTRY, AND EVERYDAY LIFE, PTS 1 AND 2, 2002, 4900 : 225 - 239
  • [2] Scanning probe microscopy and nanotechnology
    Bykov, VA
    [J]. MOLECULAR MANUFACTURING, 1996, 2 : 67 - 76
  • [3] SCANNING PROBE MICROSCOPY AND NANOTECHNOLOGY
    LOMAS, M
    ROBERTS, CJ
    DAVIES, MC
    JACKSON, DE
    TENDLER, SJB
    [J]. CHEMISTRY & INDUSTRY, 1993, (18) : 707 - 711
  • [4] SCANNING PROBE MICROSCOPY - TOOL FOR NANOTECHNOLOGY
    VANSLAMBROUCK, TW
    [J]. ADVANCED MATERIALS & PROCESSES, 1994, 146 (01): : 18 - 20
  • [5] Surface analysis algorithms for scanning probe microscopy
    Lindquist, CS
    Urban, FK
    [J]. THIN SOLID FILMS, 1995, 270 (1-2) : 399 - 405
  • [6] Scanning probe microscopy for bio & nanotechnology onboard the ISS
    von Richter, A
    Heckl, WM
    Reiter, M
    Lindner, R
    [J]. PROCEEDINGS OF THE EUROPEAN SYMPOSIUM ON LIFE IN SPACE FOR LIFE ON EARTH, 2002, 501 : 285 - 288
  • [7] Scanning probe microscopy/spectroscopy and its applications for nanotechnology
    Susla, B
    Czajka, R
    Szuba, S
    Kaminski, M
    Hihara, T
    [J]. INTERNATIONAL CONFERENCE ON SOLID STATE CRYSTALS 2000: EPILAYERS AND HETEROSTRUCTURES IN OPTOELECTRONICS AND SEMICONDUCTOR TECHNOLOGY, 2001, 4413 : 182 - 187
  • [8] WSXM:: A software for scanning probe microscopy and a tool for nanotechnology
    Horcas, I.
    Fernandez, R.
    Gomez-Rodriguez, J. M.
    Colchero, J.
    Gomez-Herrero, J.
    Baro, A. M.
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (01):
  • [9] Feature-oriented scanning methodology for probe microscopy and nanotechnology
    Lapshin, RV
    [J]. NANOTECHNOLOGY, 2004, 15 (09) : 1135 - 1151
  • [10] Features of determination of the surface roughness using scanning probe microscopy
    Novikov V.A.
    [J]. Journal of Surface Investigation, 2016, 10 (03): : 567 - 569
12345