UV-photodetector based on NiO/diamond film

被引：46

作者：

Chang, Xiaohui ^{[1
]}

Wang, Yan-Feng ^{[1
]}

Zhang, Xiaofan ^{[1
]}

Liu, Zhangcheng ^{[1
]}

Fu, Jiao ^{[1
]}

Fan, Shuwei ^{[1
]}

Bu, Renan ^{[1
]}

Zhang, Jingwen ^{[1
]}

Wang, Wei ^{[1
]}

Wang, Hong-Xing ^{[1
]}

Wang, Jingjing ^{[2
]}

机构：

[1] Xi An Jiao Tong Univ, Inst Wide Band Gap Semicond, Xian 710049, Shaanxi, Peoples R China

[2] Heibei Semicond Res Inst, Nation Key Lab ASIC, Shijiazhuang 050051, Hebei, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 2018年 / 112卷 / 03期

关键词：

DIAMOND DETECTORS; FABRICATION;

D O I：

10.1063/1.5004269

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this study, a NiO/diamond UV-photodetector has been fabricated and investigated. A single crystal diamond (SCD) layer was grown on a high-pressure-high-temperature Ib-type diamond substrate by using a microwave plasma chemical vapor deposition system. NiO films were deposited directly by the reactive magnetron sputtering technique in a mixture gas of oxygen and argon onto the SCD layer. Gold films were patterned on NiO films as electrodes to form the metal-semiconductor-metal UV-photodetector which shows good repeatability and a 2 orders of magnitude UV/visible rejection ratio. Also, the NiO/diamond photodetector has a higher responsivity and a wider response range in contrast to a diamond photodetector. Published by AIP Publishing.

引用

页数：5

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