Photochemical processes in photoresist layers based on cresol-formaldehyde resins and ortho-naphthoquinonediazides in the presence of donor additives

被引:0
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作者
Grishina, AD [1 ]
Khazova, GO [1 ]
Tedoradze, MG [1 ]
Vannikov, AV [1 ]
Koltsov, YI [1 ]
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[1] NAUCHNO ISSLEDOVATELSKII INST MATERIALOVEDENIYA A,MOSCOW,RUSSIA
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TB8 [摄影技术];
学科分类号
0804 ;
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页码:6 / 14
页数:9
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  • [1] Xerographic dark discharge of photoresist layers based on cresol-formaldehyde resins
    Kolesnikov, VA
    Khazova, GO
    Grishina, AD
    Vannikov, AV
    [J]. ZHURNAL NAUCHNOI I PRIKLADNOI FOTOGRAFII, 1999, 44 (01): : 48 - 58
  • [2] Photochemical processes in photoresists based on novolac cresol-formaldehyde resins containing electron-donating additives
    Grishina, AD
    Vannikov, AV
    Khazova, GO
    Tedoradze, MG
    Kol'tsov, YI
    [J]. HIGH ENERGY CHEMISTRY, 1998, 32 (03) : 181 - 184