LASER BEAM PROPAGATION THROUGH THREE-DIMENSIONAL HIGH-ASPECT-RATIO MICROHOLES

被引:0
|
作者
Tao, Sha [1 ]
Wu, Benxin [1 ]
Lei, Shuting
机构
[1] IIT, Dept Mech Mat & Aerosp Engn, Chicago, IL 60616 USA
关键词
FEMTOSECOND; PULSES; METALS;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The drilling of high-aspect-ratio microholes has very important applications in automotive, aerospace, electronics and other areas. However, this is difficult to realize with conventional mechanical machining or electrical discharge machining approaches. Laser ablation can potentially provide a good solution to this, but it also involves many technical difficulties. One of these is that the hole structure may act like a wave guide and affect the laser beam propagation. However, previous investigations on this important issue are very limited. In this paper, laser beam propagation through high-aspect-ratio microholes has been studied by solving the three-dimensional transient Maxwell's wave equation, and the important discoveries from the calculations are discussed.
引用
收藏
页码:215 / 219
页数:5
相关论文
共 50 条
  • [1] Three-dimensional high-aspect-ratio recording in resist
    Kondo, Toshiaki
    Juodkazis, Saullus
    Mizeikis, Vygantas
    Misawa, Hiroaki
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 2008, 354 (12-13) : 1194 - 1197
  • [2] Fabrication of high-aspect-ratio electrode arrays for three-dimensional microbatteries
    Chamran, Fardad
    Yeh, Yuting
    Min, Hong-Seok
    Dunn, Bruce
    Kim, Chang-Jin
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (04) : 844 - 852
  • [3] Non-diffraction-length Bessel-beam femtosecond laser drilling of high-aspect-ratio microholes in PMMA
    Wang, Haoran
    Zhang, Fan
    Ding, Kaiwen
    Duan, Jian
    [J]. OPTIK, 2021, 229
  • [4] Investigation of Cell Culturing on High-Aspect-Ratio, Three-Dimensional Silicon Microstructures
    Merlo, Sabina
    Barillaro, Giuseppe
    Carpignano, Francesca
    Surdo, Salvatore
    Strambini, Lucanos Marsilio
    Montecucco, Alessandra
    Leva, Valentina
    Mazzini, Giuliano
    [J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2012, 18 (03) : 1215 - 1222
  • [5] High-aspect-ratio three-dimensional electrospinning via a tip guiding electrode
    Zheng, Gaofeng
    Jiang, Jiaxin
    Wang, Xiang
    Li, Wenwang
    Yu, Zhaojie
    Lin, Liwei
    [J]. MATERIALS & DESIGN, 2021, 198
  • [6] Three-Dimensional Aeroelastic Model for Successive Analyses of High-Aspect-Ratio Wings
    Otsuka, Keisuke
    Wang, Yinan
    Makihara, Kanjuro
    [J]. JOURNAL OF VIBRATION AND ACOUSTICS-TRANSACTIONS OF THE ASME, 2021, 143 (06):
  • [7] Cooperative simulation of lithography and topography for three-dimensional high-aspect-ratio etching
    Ichikawa, Takashi
    Yagisawa, Takashi
    Furukawa, Shinichi
    Taguchi, Takafumi
    Nojima, Shigeki
    Murakami, Sadatoshi
    Tamaoki, Naoki
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2018, 57 (06)
  • [8] The Interactions of Microhole Sidewall With Plasma induced by Femtosecond Laser Ablation in High-Aspect-Ratio Microholes
    Wu, Benxin
    Tao, Sha
    Lei, Shuting
    [J]. JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2012, 134 (01):
  • [9] Structural changes during femtosecond laser percussion drilling of high-aspect-ratio diamond microholes
    Shen, Tianlun
    Chen, Tao
    Si, Jinhai
    Gao, Bo
    Hu, Wenbo
    Wang, Hongxing
    Hou, Xun
    [J]. OPTICAL ENGINEERING, 2022, 61 (01)
  • [10] High-aspect-ratio copper via filling used for three-dimensional chip stacking
    Sun, Jian-Jun
    Kondo, Kazuo
    Okamura, Takuji
    Oh, SeungJin
    Tomisaka, Manabu
    Yonemura, Hitoshi
    Hoshino, Masataka
    Takahashi, Kenji
    [J]. J Electrochem Soc, 6 (G355-G358):