IMPROVED PIEZOELECTRIC MEMS ACOUSTIC EMISSION SENSORS

被引：0

作者：

Li, Yongfang ^{[1
]}

Omori, Takahiro ^{[1
]}

Watabe, Kazuo ^{[1
]}

Toshiyoshi, Hiroshi ^{[2
]}

机构：

[1] Toshiba Co Ltd, Corp Res & Dev Ctr, Kawasaki, Kanagawa, Japan

[2] Univ Tokyo, Inst Ind Sci, Tokyo, Japan

来源：

2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2021年

关键词：

AE sensor; piezoelectric; MEMS; output voltage; top electrode; dummy structure; sensitivity; PLB tests;

D O I：

10.1109/TRANSDUCERS50396.2021.9495552

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes two innovative methods for improving the sensitivity of piezoelectric MEMS acoustic emission (AE) sensors. By optimizing the top electrode dimensions and adding a dummy structure to it, the peak sensitivity of the fabricated MEMS AE sensors at resonance can be improved to 148 V/m/s, which is about 10-fold greater than that of sensors with a full-size top electrode. Standard pencil-lead break (PLB) tests are conducted to verify the detection capability of AE waves. As a result, the fabricated single-type piezoelectric MEMS AE sensor, which has a peak sensitivity of 45 V/m/s, is shown to have the same level of detection sensitivity as a commercial bulk piezoelectric AE sensor.

引用

页码：238 / 241

页数：4

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