Reciprocal space mapping and strain scanning using X-ray diffraction microscopy

被引：23
|
作者：
Poulsen, H. F. [1 ]
Cook, P. K. [2 ]
Leemreize, H. [1 ,3 ]
Pedersen, A. F. [1 ]
Yildirim, C. [2 ,4 ]
Kutsal, M. [2 ]
Jakobsen, A. C. [1 ]
Trujillo, J. X. [5 ]
Ormstrup, J. [1 ]
Detlefs, C. [2 ]
机构：
[1] Tech Univ Denmark, Dept Phys, DK-2800 Lyngby, Denmark
[2] European Synchrotron Radiat Facil, 71 Ave Martyrs, F-38043 Grenoble 9, France
[3] Danish Technol Inst, Taastrup, Denmark
[4] OCAS, JF Kennedylaan 3, B-9060 Zelzate, Belgium
[5] Tech Univ Denmark, Dept Energy Storage & Convers, DK-4000 Roskilde, Denmark
来源：
JOURNAL OF APPLIED CRYSTALLOGRAPHY | 2018年 / 51卷
基金：
欧洲研究理事会;
关键词：
X-ray diffraction microscopy; diffraction contrast tomography; structural characterization; synchrotron radiation; tomography; diffraction imaging; TRIPLE-CRYSTAL DIFFRACTOMETER; ENERGY SYNCHROTRON-RADIATION; COMPOUND REFRACTIVE LENS; RESOLUTION FUNCTION; LAUE GEOMETRY; OPTICS;
D O I：
10.1107/S1600576718011378
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Dark-field X-ray microscopy is a new full-field imaging technique for nondestructivelymapping the structure of deeply embedded crystalline elements in three dimensions. Placing an objective in the diffracted beam generates a magnified projection image of a local volume. By placing a detector in the back focal plane, high-resolution reciprocal space maps are generated for the local volume. Geometrical optics is used to provide analytical expressions for the resolution and range of the reciprocal space maps and the associated field of view in the sample plane. To understand the effects of coherence a comparison is made with wavefront simulations using the fractional Fourier transform. Reciprocal space mapping is demonstrated experimentally at an X-ray energy of 15.6keV. The resolution function exhibits suppressed streaks and an FWHM resolution in all directions of Q/Q = 4x10(-5) or better. It is demonstrated by simulations that scanning a square aperture in the back focal plane enables strain mapping with no loss in resolution to be combined with a spatial resolution of 100nm.
引用
收藏
页码：1428 / 1436
页数：9
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