Characteristics of Nanopatterns and the Associated Thermal Mechanisms During Near Field Laser-Material Interaction of Nanosecond Laser on Different Targets

被引:0
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作者
Sundaram, Vijay M. [1 ]
Wen, Sy-Bor [1 ]
机构
[1] Texas A&M Univ, Dept Mech Engn, College Stn, TX 77843 USA
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TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Nano-patterns are generated on semiconducting and metallic surfaces through coupling an apertured near field scanning optical microscope (NSOM) with a pulsed laser source in this study. To understand the dominant mechanisms for the generation of the nano-patterns, a series of experimental measurement of the size and shape of nano-patterns generated on targets under different experimental conditions with different targets is conducted. The characteristic dimensions of nano-patterns show dependence on optical properties of the target material. The qualitative trend of the variation of nano-patterns as a function of laser and material conditions indicates that the dominant mechanisms for the generation of nano-patterns through a combination of nanosecond laser and an apertured NSOM under different conditions studied is near field laser-material interaction.
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页码:631 / 638
页数:8
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