[1] City Univ Hong Kong, Ctr Super Diamond & Adv Films, Dept Mat Sci & Engn, Hong Kong 999077, Hong Kong, Peoples R China
[2] Shenzhen Univ, Guangdong Prov Key Lab Micro Nano Optomechatron E, Coll Mechatron & Control Engn, Shenzhen 518060, Peoples R China
[3] City Univ Hong Kong, Dept Mech & Biomed Engn, 83 Tat Chee Ave, Hong Kong, Hong Kong, Peoples R China
[4] Tsinghua Univ, Sch Mat Sci & Engn, Beijing 100084, Peoples R China
[5] Natl Ctr Nanosci & Technol, CAS Key Lab Nanosyst & Hierarch Fabricat, CAS Ctr Excellence Nanosci, Beijing 100190, Peoples R China
[6] Qiqihar Univ, Sch Mat Sci & Engn, Qiqihar 161006, Peoples R China
[7] Hong Kong Polytech Univ, Dept Mech Engn, Kowloon, Hong Kong, Peoples R China