A sliding-mode control approach in ultra-precision positioning system

被引：0
|
作者：
Choi, Insung [1 ]
Choi, Seungok [1 ]
Heo, Gunhaeng [1 ]
Park, Kiheon [1 ]
You, Kwanho [1 ]
机构：
[1] Sungkyunkwan Univ, Suwon 440746, South Korea
来源：
KNOWLEDGE-BASED INTELLIGENT INFORMATION AND ENGINEERING SYSTEMS: KES 2007 - WIRN 2007, PT II, PROCEEDINGS | 2007年 / 4693卷
关键词：
D O I：
暂无
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
It is known that the time optimal control seeks a target position faster than sliding-mode control. However, the time optimal control is vulnerable to chattering effect more than sliding-mode control. Especiall y for the nanometric scale positioning system under the parameter uncertainty and external disturbances, this can cause an actuator saturation. To solve this problem, we present the design of a robust optimal controller for an ultra-precision positioning stage. The control algorithm is a sliding-mode approach based on linear quadratic optimal control. Some simulation results are examined to demonstrate the effectiveness of the proposed controller.
引用
收藏
页码：728 / 735
页数：8
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