Simulation of 3D Gaussian surface topography

Gaussian isotropic and anisotropic surfaces of desired areal autocorrelation function were modeled using procedures found in technical literature. Next measured 3D surfaces of normal ordinate distribution were tested. The special procedure was developed for simulating 3D surfaces after one-step honing. The similarities between the modeled and real areal autocorrelation functions were analysed. Measured and modeled surface topography parameters were also compared. It was found that surface topography modeling ensured good matching accuracy of statistical height parameters and slope. The uncertainty of other parameters was greater. (C) 2010 Elsevier B.V. All rights reserved.