LASER combined with Plasma: Will it be the future's green and safe IC decapsulation method?

被引:0
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作者
Poirier, Patrick [1 ]
Obein, Michael [1 ]
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[1] Digit Concept, Caen, France
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码:474 / 479
页数:6
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