Improvement of n-ZnO/p-Si photodiodes by embedding of silver nanoparticles

被引:12
|
作者
Hu, Zhan-Shuo [2 ]
Hung, Fei-Yi [1 ]
Chang, Shoou-Jinn [2 ,3 ,4 ]
Chen, Kuan-Jen
Tseng, Yi-Wei [1 ]
Huang, Bohr-Ran [5 ,6 ]
Lin, Bo-Cheng [6 ]
Chou, Wei-Yang [2 ]
Chang, Jay [2 ]
机构
[1] Natl Cheng Kung Univ, Inst Nanotechnol & Microsyst Engn, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Inst Electroopt Sci & Engn, Tainan 701, Taiwan
[3] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan
[4] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Dept Elect Engn, Tainan 701, Taiwan
[5] Natl Taiwan Univ Sci & Technol, Grad Inst Electroopt Engn, Taipei 106, Taiwan
[6] Natl Taiwan Univ Sci & Technol, Dept Elect Engn, Taipei 106, Taiwan
关键词
Zinc oxide; Photodiode; Ag nanoparticles; Heat treatment; Photosensors; SURFACE-PLASMON RESONANCE; LIGHT-SCATTERING; FILMS; PHOTODETECTORS; PROBES;
D O I
10.1007/s11051-011-0446-4
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The photo-current of n-ZnO/p-Si heterojunction photodiodes was improved by embedding Ag nanoparticles in the interface (ZnO/nano-P(Ag)/p-Si), and the ratio between photo- and dark-current increased by about three orders more than that of a n-ZnO/p-Si specimen. The improvement in the photo-current resulted from the light scattering of embedded Ag nanoparticles. The I-V curve of n-ZnO/p-Si degraded after thermal treatment (A-ZnO/p-Si) because the silicon robbed the oxygen from ZnO to form amorphous silicon dioxide and left an oxygen vacancy. Notably, the properties of ZnO/nano-P(Ag)/p-Si were better in the time-dependent photoresponse under 10 V bias. Ag nanoparticles (15-20 nm) scattered the UV light randomly and increased the probability for the absorption of ZnO to enhance the properties of the photodiode.
引用
收藏
页码:4757 / 4763
页数:7
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