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Pump it up
被引：10
|作者：
Maffli, Luc
[1
]
O'Brien, Benjamin
[2
]
Rosset, Samuel
[1
]
Shea, Herbert
[1
]
机构：
[1] Ecole Polytech Fed Lausanne, Microsyst Space Technol Lab LMTS, Neuchatel, Switzerland
[2] Univ Auckland, Bioengn Inst, Biomimet Lab, Auckland 1, New Zealand
来源：
基金：
瑞士国家科学基金会;
关键词：
Electro Active Polymers;
Dielectric Elastomer Actuators;
microfluidics;
zipping;
microfabrication;
micropump;
PDMS;
KOH;
Au ion implantation;
ELASTOMERS;
D O I：
10.1117/12.914831
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
We report on the use of zipping actuation applied to dielectric elastomer actuators to microfabricate mm-sized pumps. The zipping actuators presented here use electrostatic attraction to deform an elastomeric membrane by pulling it into contact with a rigid counter electrode. We present several actuation schemes using either conventional DEA actuation, zipping, or a combination of both in order to realize microfluidic devices. A zipping design in which the electric field is applied across the elastomer membrane was explored theoretically and experimentally. Single zipping chambers and a micropump body made of a three chambers connected by an embedded channel were wet-etched into a silicon wafer and subsequently covered by a gold-implanted silicone membrane. We measured static deflections of up to mu m on chambers with square openings of 1.8 and 2.6 mm side, in very good agreement with our model.
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页数：16
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