Optically pumped 1550nm wavelength tunable MEMS VCSEL

被引：1
|
作者：
Sahoo, Hitesh K. [1 ]
Ansbaek, Thor [2 ]
Ottaviano, Luisa [1 ]
Semenova, Elizaveta S. [1 ]
Hansen, Ole [3 ]
Yvind, Kresten [1 ]
机构：
[1] Tech Univ Denmark, DTU Foton, Lyngby, Denmark
[2] OCTLIGHT Aps, Lyngby, Denmark
[3] Tech Univ Denmark, DTU Nanotech, Lyngby, Denmark
来源：
MOEMS AND MINIATURIZED SYSTEMS XV | 2016年 / 9760卷
关键词：
VCSEL; MEMS; OCT; tunable; laser source; optically-pumped; 1550nm; bonding; SOI; InP; III-V; COHERENCE TOMOGRAPHY;
D O I：
10.1117/12.2209563
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with an enclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells are bonded to the SOI and the last mirror is made from the deposition of dielectric materials. The design brings in flexibility to fabricate MEMS VCSELs over a wider range of wavelengths. The paper discusses results from the simulations and bonding results from fabrication. The device will push the boundaries for wavelength sweep speed and bandwidth.
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页数：10
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