Investigation on the structure and properties of AlxCr1-xN coatings deposited by reactive magnetron co-sputtering

被引：17
|
作者：
Wang, X. [1 ]
Wang, L. S. [1 ]
Qi, Z. B. [2 ]
Yue, G. H. [1 ]
Chen, Y. Z. [1 ]
Wang, Z. C. [2 ]
Peng, D. L. [1 ]
机构：
[1] Xiamen Univ, Dept Mat Sci & Engn, Coll Mat, Xiamen 361005, Peoples R China
[2] Xiamen Univ, Dept Chem & Chem Engn, Xiamen 361005, Peoples R China
来源：
JOURNAL OF ALLOYS AND COMPOUNDS | 2010年 / 502卷 / 01期
基金：
中国国家自然科学基金;
关键词：
AlxCr1-xN coatings; Vapor deposition; N-2 flow rate; Working pressure; Microstructure; Hardness; CATHODIC ARC EVAPORATION; AB-INITIO; SPINODAL DECOMPOSITION; NANOCOMPOSITE COATINGS; MECHANICAL-PROPERTIES; SPUTTERING METHOD; PHASE-TRANSITION; THIN-FILMS; MICROSTRUCTURE; CR-1-XALXN;
D O I：
10.1016/j.jallcom.2010.04.155
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Al-rich AlxCr1-xN coatings have been deposited by reactive magnetron co-sputtering using a direct current (DC) power source to Al and a radio frequency (RF) power source to Cr target. The crystal structure, chemical composition, surface morphology, thickness and hardness of the AlxCr1-xN coatings which were prepared at various N-2 flow rates and working pressures have been systemically investigated. The results show a strong effect of N-2 flow rates and working pressures on the phase composition and microstructure as well as the Al content in AlxCr1-xN coatings. The present results also show Al contents play an important role in the hardness of the AlxCr1-xN coatings, which demonstrates the highest hardness for Al contents close to the maximum solubility in cubic AlxCr1-xN. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：243 / 249
页数：7
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