A new technique for measuring Poisson's ratio of MEMS materials

被引：0
|
作者：
Sharpe, WN
Vaidyanathan, KR
Yuan, B
Edwards, RL
机构：
[1] MER CORP,TUCSON,AZ 85706
[2] JOHNS HOPKINS UNIV,APPL PHYS LAB,LAUREL,MD 20723
来源：
MATERIALS FOR MECHANICAL AND OPTICAL MICROSYSTEMS | 1997年 / 444卷
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
New techniques and procedures for measuring Poisson's ratio of MEMS materials are presented. Tensile specimens of polysilicon that are 3.5 mu m thick are pulled in a small test machine that has a linear air bearing to eliminate friction. Biaxial strain is measured directly by laser-based interferometry from four gold lines deposited on the specimen surface. The value of Poisson's ratio for vapor-deposited polysilicon is 0.22 +/- 0.01 as determined from 19 tests.
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页码：185 / 190
页数：4
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