Displacement measurement using Talbot effect

被引:0
|
作者
Sun, Haibin [1 ]
Liu, Tingting [1 ]
Chen, Jun [1 ]
Sun, Ping [2 ]
机构
[1] Taishan Univ, Coll Phys & Elect Engn, Tai An 271000, Shandong, Peoples R China
[2] Shandong Normal Univ, Shandong Prov Key Lab Opt & Photon Device, Jinan 250014, Shandong, Peoples R China
关键词
Talbot effect; digital image correlation; speckle; displacement measurement; ARRAY ILLUMINATORS; LITHOGRAPHY; DIFFRACTION; PROJECTION;
D O I
10.1117/12.2543190
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Linear gratings and circular gratings are most commonly used in the applications of Talbot effect, due to their simple patterns and ease of analysis of Moire fringes. In the present paper, we demonstrate a scheme to measure the displacement of a deformed object which based on the Talbot effect. We designed a hologram of a two-dimensional square-hole grating. For the test, we used a computer-controlled liquid crystal spatial light modulator (LC-SLM) and the computer-generated Talbot array hologram. The Talbot array hologram is displayed on the LC-SLM screen. The beam diffracted by the grating is transmitted to the surface of an object. By adjusting the distance between the LC-SLM and the object, a clear image is formed on the surface of the object. A speckled pattern of the object surface is captured by a CCD camera. Two speckle patterns before and after the deformation is recorded. The information about the displacement is codified in the intensity pattern. The displacement can be obtained by digital image correlation (DIC). The DIC obtains the displacement components by comparing the gray intensity changes between the digital images of an object surface before and after the deformation. This method is simple and easy, and can be used as an alternative method to measure in-plane and out-of-plane displacements. Theoretical and experimental results are presented.
引用
收藏
页数:8
相关论文
共 50 条
  • [1] Displacement measurement using the Talbot effect with a Ronchi grating
    Spagnolo, GS
    Ambrosini, D
    Paoletti, D
    [J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2002, 4 (06): : S376 - S380
  • [2] In-plane displacement measurement by using circular grating Talbot interferometer
    Agarwal, Shilpi
    Shakher, Chandra
    [J]. OPTICS AND LASERS IN ENGINEERING, 2015, 75 : 63 - 71
  • [3] Measurement of the spatial coherence of synchrotron beams using the Talbot effect
    Kluender, Rafael
    Masiello, Fabio
    van Vaerenbergh, Pierre
    Haertwig, Juergen
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2009, 206 (08): : 1842 - 1845
  • [4] REAL-TIME MEASUREMENT OF THE MENISCUS SHAPE USING THE TALBOT EFFECT
    BOURIMBORDE, LV
    TONSO, AO
    COLAUTTI, CMV
    SICRE, EE
    [J]. OPTICS COMMUNICATIONS, 1993, 102 (5-6) : 397 - 401
  • [5] Measurement of wafer surface using shadow moire technique with talbot effect
    Wei, S
    Wu, S
    Kao, I
    Chiang, FP
    [J]. JOURNAL OF ELECTRONIC PACKAGING, 1998, 120 (02) : 166 - 170
  • [6] Refined grating fabrication using Displacement Talbot Lithography
    Chen, Hong
    Qin, Li
    Chen, Yongyi
    Jia, Peng
    Gao, Feng
    Chen, Chao
    Liang, Lei
    Zhang, Xing
    Lou, Hongwei
    Ning, Yongqiang
    Wang, Lijun
    [J]. MICROELECTRONIC ENGINEERING, 2018, 189 : 74 - 77
  • [7] MEASUREMENT OF THE REFRACTIVE-INDEX USING THE TALBOT EFFECT AND A MOIRE TECHNIQUE
    BHATTACHARYA, JC
    [J]. APPLIED OPTICS, 1989, 28 (13): : 2600 - 2604
  • [8] Phase measurement of periodic optical pulses using temporal fractional Talbot effect
    Berger, NK
    Levit, B
    Fischer, B
    [J]. ELECTRONICS LETTERS, 2005, 41 (17) : 976 - 978
  • [9] MEASUREMENT OF THE FOCAL LENGTH OF A COLLIMATING LENS USING THE TALBOT EFFECT AND THE MOIRE TECHNIQUE
    BHATTACHARYA, JC
    AGGARWAL, AK
    [J]. APPLIED OPTICS, 1991, 30 (31): : 4479 - 4480
  • [10] DISPERSION CURVE MEASUREMENT USING TALBOT BANDS
    WARENGHEM, M
    GROVER, CP
    [J]. REVUE DE PHYSIQUE APPLIQUEE, 1988, 23 (06): : 1169 - 1178