Anatase TiO2 films based CO gas sensor:: Film thickness, substrate and temperature effects

被引：99
|
作者：
Al-Homoudi, Ibrahim A.
Thakur, J. S. [1 ]
Naik, R.
Auner, G. W.
Newaz, G.
机构：
[1] Wayne State Univ, Dept Elect & Comp Engn, Detroit, MI 48202 USA
[2] Wayne State Univ, Inst Mfg Res, Detroit, MI 48202 USA
[3] Wayne State Univ, Dept Phys & Astron, Detroit, MI 48202 USA
[4] Wayne State Univ, Dept Mech Engn, Detroit, MI 48202 USA
来源：
APPLIED SURFACE SCIENCE | 2007年 / 253卷 / 21期
关键词：
anatase; titanium oxide; thin film; carbon monoxide; sputtering;
D O I：
10.1016/j.apsusc.2007.04.068
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Electrical response of anatase TiO2, films is discussed for different concentrations of CO gas (20-100 ppm) in a nitrogen gas ambient. We investigated temperature (100-300 degrees C and film thickness (100-1000 nm) effects for films deposited on glass, sapphire (0 0 0 1) and, Si(1 0 0) substrates. In general, there is a drop in resistance of the device when exposed to CO gas. Films deposited on sapphire showed a larger decrease in the resistance at 300 degrees C compared to those deposited on glass and silicon substrates. However, films grown on glass and silicon substrates showed a larger decrease in the resistance values for temperature around 200 degrees C when CO (ppm) values are greater than 40. The change in resistance of the films varies as square root of the CO gas concentration at 200 degrees C for films deposited on all the three substrates. In general, the decrease in resistance for thicker films is large compared to thinner ones, indicating participation of the bulk in the detection of CO gas. In the presence of O-2, film loses its sensitivity to CO gas when the concentration level of O-2 approaches 1800 ppm. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：8607 / 8614
页数：8
相关论文
共 50 条
  • [1] Anatase TiO2 thin films based CO gas sensor
    Al-Homoudi, Ibrahim A.
    Rimai, L.
    Naik, R.
    Baird, R. J.
    Auner, G. W.
    Newaz, G.
    [J]. MATERIAL AND DEVICES FOR SMART SYSTEMS II, 2006, 888 : 283 - +
  • [2] TiO2 anatase thin films as gas sensors
    [J]. Tang, H., 1600, Elsevier Science S.A., Lausanne, Switzerland (B26):
  • [3] Processes for obtaining TiO2 anatase phase and their effects on the gas sensor performances
    Ruiz, A
    Dezanneau, G
    Cornet, A
    Morante, JR
    Calleja, A
    Espiell, F
    [J]. SENSORS FOR ENVIRONMENTAL CONTROL, 2003, : 69 - 73
  • [4] Micro spherical anatase phase TiO2 thin films for room temperature operated formaldehyde gas sensor applications
    Rajkumar, D.
    Umamahesvari, H.
    Nagaraju, P.
    [J]. RESULTS IN CHEMISTRY, 2023, 5
  • [5] TIO2 ANATASE THIN-FILMS AS GAS SENSORS
    TANG, H
    PRASAD, K
    SANJINES, R
    LEVY, F
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) : 71 - 75
  • [6] A Hydrogen Gas Sensor Based on TiO2 Nanoparticles on Alumina Substrate
    Chachuli, Siti Amaniah Mohd
    Hamidon, Mohd Nizar
    Mamat, Md. Shuhazlly
    Ertugrul, Mehmet
    Abdullah, Nor Hapishah
    [J]. SENSORS, 2018, 18 (08)
  • [7] High quality anatase TiO2 film:: Field-effect transistor based on anatase TiO2
    Katayama, Masao
    Ikesaka, Shinya
    Kuwano, Jun
    Koinuma, Hideomi
    Matsumoto, Yuji
    [J]. APPLIED PHYSICS LETTERS, 2008, 92 (13)
  • [8] Modulating the Residual Stress of Ion-Assisted TiO2 Films during Annealing with Film Thickness and Substrate Temperature
    Chen, Hsi-Chao
    Huang, Chen-Yu
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (07)
  • [9] Effects of substrate temperature on the microstructure and photocatalytic reactivity of TiO2 films
    Wang, HY
    Wang, TM
    Xu, P
    [J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1998, 9 (05) : 327 - 330
  • [10] Effects of substrate temperature on the microstructure and photocatalytic reactivity of TiO2 films
    HUIYAO Wang
    TIANMIN Wang
    PEI Xu
    [J]. Journal of Materials Science: Materials in Electronics, 1998, 9 : 327 - 330
12345