Vibration Analysis of Cubic Rotary-Linear Piezoelectric Actuator

Cubic design of a stator in a rotary-linear piezoelectric actuator is sophisticated and interesting, but the vibration theory of the cubic stator remains unclear when using the finite element method (FEM). In this paper, we analyze the vibration behavior of the cubic stator by applying the energy method, which distinguishes the component of mechanical energy. By changing the design of the stator (especially the length in the direction of the through-hole axis), we clarify how the vibration modes are in accordance at one equal frequency in cubic shape. The behavior of the vibration modes is discussed using conventional vibration theory of a beam and a plate.