Interface reactions among electrodes, substrates and Pb(Zr,Ti)O3-based films

被引：0

作者：

Kosec, M ^{[1
]}

Malic, B ^{[1
]}

Holc, J ^{[1
]}

Hrovat, M ^{[1
]}

Mandeljc, M ^{[1
]}

Bencan, A ^{[1
]}

Samardzija, Z ^{[1
]}

Drazic, G ^{[1
]}

机构：

[1] Jozef Stefan Inst, Ljubljana 1000, Slovenia

来源：

ACTA CHIMICA SLOVENICA | 2001年 / 48卷 / 01期

关键词：

ferrolectric ceramics; interactions; heterostructrure; films; conductive oxides;

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Interactions between (Pb,La)(Zr, Ti)O-3 (PLZT) thin and thick films and silicon or alumina substrates, respectively, were studied. In the case of thin films the lowering of the firing temperature inhibits the formation of secondary phases. For thick films the additional layer of PLZT between the alumina substrate and the Pt electrode improves adhesion within the PLZT thick-film heterostructures. Interactions between conductive oxides which could be used as electrodes instead of noble metals and PZT-based materials are reported.

引用

页码：51 / 62

页数：12

共 50 条

[1] High piezoelectricity of Pb(Zr,Ti)O3-based ternary compound thin films on silicon substrates
Zhang, Tao
Wasa, Kiyotaka
Zhang, Shu-yi
Chen, Zhao-jiang
Zhou, Feng-mei
Zhang, Zhong-ning
Yang, Yue-tao
APPLIED PHYSICS LETTERS, 2009, 94 (12)
[2] Oxide electrodes as barriers to hydrogen damage of Pb(Zr,Ti)O3-based ferroelectric capacitors
Aggarwal, S
Perusse, SR
Nagaraj, B
Ramesh, R
APPLIED PHYSICS LETTERS, 1999, 74 (20) : 3023 - 3025
[3] Effect of hydrogen on Pb(Zr, Ti)O3-based ferroelectric capacitors
Aggarwal, S
Perusse, SR
Tipton, CW
Ramesh, R
Drew, HD
Venkatesan, T
Romero, DB
Podobedov, VB
Weber, A
APPLIED PHYSICS LETTERS, 1998, 73 (14) : 1973 - 1975
[4] Fabrication and properties of Pb(Zr,Ti)O3-based ceramics for photostrictors
Nonaka, K
Akiyama, M
Hagio, T
Takase, A
FERROELECTRICS, 2000, 239 (1-4) : 1143 - 1150
[5] Fabrication and characterization of bilayered Pb(Zr,Ti)O3-based ceramics
He, ZM
Ma, J
Zhang, RF
Li, T
MATERIALS LETTERS, 2002, 56 (06) : 1084 - 1088
[6] Investigation of Pt/Ti bottom electrodes for Pb(Zr,Ti)O-3 films
Kim, ST
Kim, HH
Lee, MY
Lee, WJ
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (1A): : 294 - 300
[7] Investigation of Pt/Ti bottom electrodes for Pb(Zr, Ti)O3 films
Korea Advanced Inst of Science and, Technology, Taejon, Korea, Republic of
Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, 1 A (294-300):
[8] Domain Contribution to Elastic Nonlinearity in Pb(Zr, Ti)O3-based Piezoelectric Ceramics
Hagiwara, Manabu
Hoshina, Takuya
Takeda, Hiroaki
Tsurumi, Takaaki
ELECTROCERAMICS IN JAPAN XVI, 2014, 582 : 3 - 6
[9] Microstructure of Pb(Zr, Ti)O3-based pyroelectric ceramics HIPped with glass encapsulation
Shizuoka Industrial Research Inst, Shizuoka, Japan
Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, 9 B (5984-5988):
[10] Preparation of Pb(Zr, Ti)O3 thin films on glass substrates
Hioki, T
Akiyama, M
Ueda, T
Onozuka, Y
Hara, Y
Suzuki, K
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (9B): : 5408 - 5412

← 1 2 3 4 5 →