Fast tracking of light source with micromirror and associated feedback circuit

被引：0
|
作者：
Park, J. H. [1 ]
Chung, T. [1 ]
Park, I. H. [1 ]
Jeon, J. A. [1 ]
Yoo, B. W. [1 ]
Kim, M. [1 ]
Kim, Y. K. [1 ]
机构：
[1] Ewha Womans Univ, Res Ctr MEMS Space Telescope, Seoul 120750, South Korea
来源：
2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2007年
关键词：
D O I：
10.1109/OMEMS.2007.4373839
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a closed-loop feedback control of a micromirror has been demonstrated to track a moving light source and to stabilize fast the tilting angle to follow the light source. An electrostatically actuated torsional micromirror was used as a test device. Tracking and tilt-angle stabilization has been tested using a position-sensing detector and analog feedback control circuit. We found a successful tracking of a moving light source and the feedback control to improve the response time of micromirrors significantly, down to 200 mu s in comparison to about 600 mu s for the case of absence of feedback control.
引用
收藏
页码：59 / 60
页数：2
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