Structure and optical properties of sputter deposited pseudobrookite Fe2TiO5 thin films

被引:36
|
作者
Hai Dang Ngo [1 ,2 ]
Thien Duc Ngo [1 ,2 ]
Tamanai, Akemi [1 ,3 ]
Chen, Kai [1 ,4 ]
Nguyen Thanh Cuong [5 ]
Handegard, Orjan S. [1 ,2 ]
Pucci, Annemarie [3 ]
Umezawa, Naoto [1 ,6 ]
Nabatame, Toshihide [1 ,7 ]
Nagao, Tadaaki [1 ,2 ]
机构
[1] Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton, Tsukuba, Ibaraki 3050044, Japan
[2] Hokkaido Univ, Grad Sch Sci, Dept Condensed Matter Phys, Kita Ku, Kita 10 Nishi 8, Sapporo, Hokkaido 0600810, Japan
[3] Heidelberg Univ, Kirchhoff Inst Phys, Neuenheimer Feld 227, D-69120 Heidelberg, Germany
[4] Jinan Univ, Inst Photon Technol, Guangzhou 510632, Guangdong, Peoples R China
[5] Natl Inst Mat Sci, Int Ctr Young Scientists, Tsukuba, Ibaraki 3050044, Japan
[6] Semicond R&D Ctr, Samsung Elect, 1 Samsungjeonja Ro, Hwaseong Si 18448, Gyeonggi Do, South Korea
[7] Natl Inst Mat Sci, Nanotechnol Innovat Stn, Tsukuba, Ibaraki 3050044, Japan
基金
日本科学技术振兴机构;
关键词
TOTAL-ENERGY CALCULATIONS; IRON; TITANIUM; TRANSFORMATION; NANOPARTICLES; HEMATITE; OXIDES;
D O I
10.1039/c8ce01475b
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Iron(III) titanates are composed of earth-abundant elements and are attracting rapidly growing interest as highly promising candidates for solar-energy as well as optoelectronics applications. In this article, we report on the successful synthesis of pseudobrookite Fe2TiO5 thin films with RF sputtering followed by post-deposition annealing in air. The chemical composition, crystal structure, surface morphology, and optical properties of the films were characterized both experimentally and theoretically. The film was confirmed to be single phase and exhibited a highly crystalline orthorhombic structure with a preferential crystal orientation of (131) with excellent adhesion on both glass and silicon substrates, indicating that an epitaxial substrate is not required. Dielectric functions from spectroscopic ellipsometry and density functional theory (DFT) also provide a good understanding of the optical characteristics of the films.
引用
收藏
页码:34 / 40
页数:7
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