Analysis of temperature compensation in a plate thickness mode bulk acoustic wave resonator

被引：6
|
作者：
Xue, Huan [1 ]
Hu, Yuantai
Wang, Qing-Ming
Yang, Jiashi
机构：
[1] Huazhong Univ Sci & Technol, Sch Civil Engn & Mech, Dept Mech, Wuhan 430074, Peoples R China
[2] Univ Pittsburgh, Dept Engn Mech, Pittsburgh, PA 15261 USA
[3] Univ Nebraska, Dept Mech Engn, Lincoln, NE 68588 USA
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2007年 / 54卷 / 09期
关键词：
D O I：
10.1109/TUFFC.2007.466
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
We analyze temperature-induced frequency shift in a thickness mode bulk acoustic wave resonator with a layer of another material for temperature compensation. The perturbation integral by Tiersten is used to calculate frequency shifts in the resonator under a temperature change. It is shown that, with a proper design of the compensation layer, temperature sensitivity of the resonator can be reduced or made zero.
引用
收藏
页码：1826 / 1833
页数：8
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