Mechanical properties of Al2O3-doped (2 wt.%) ZnO films

被引：11
|
作者：
Kuriki, Shina [1 ]
Kawashima, Toshitaka [1 ]
机构：
[1] Sony Corp, Core Component Business Unit, Core Technol Dev Grp, Shinagawa Ku, Tokyo 1410001, Japan
来源：
THIN SOLID FILMS | 2007年 / 515卷 / 24期
关键词：
transparent conductive oxide; ZnO : Al; mechanical properties; nano indentation; adhesion;
D O I：
10.1016/j.tsf.2007.04.005
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report a new method of evaluating the adhesion of Al2O3-doped (2 wt.%) ZnO (AZO) thin films. The AZO films were deposited by DC reactive magnetron sputtering on plastic film (PET: polyethylencterephthalatc) at various sputtering pressures, power, and reactive gas-flow ratios. The adhesion test of the films was carried out using the nanoindentation system. The fracture point as determined by the load-displacement curve occurred at the time of separation between the thin film and the substrate. The integration value of load and displacement to the fracture point is defined as the degree of adhesion (S-w). The AZO films showed that adhesion increase as sputtering power increases and sputtering pressure decreases. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：8594 / 8597
页数：4
相关论文
共 50 条
  • [1] Optical and electrical properties of 2 wt.% Al2O3-doped ZnO films and characteristics of Al-doped ZnO thin-film transistors with ultra-thin gate insulators
    Jang, Kyungsoo
    Park, Hyeongsik
    Jung, Sungwook
    Van Duy, Nguyen
    Kim, Youngkuk
    Cho, Jaehyun
    Choi, Hyungwook
    Kwon, Taeyoung
    Lee, Wonbaek
    Gong, Daeyeong
    Park, Seungman
    Yi, Junsin
    Kim, Doyoung
    Kim, Hyungjun
    THIN SOLID FILMS, 2010, 518 (10) : 2808 - 2811
  • [2] Preparation and thermoelectric properties of Al2O3-doped ZnO ceramics
    Qu, Xiurong
    Jia, Dechang
    HIGH-PERFORMANCE CERAMICS V, PTS 1 AND 2, 2008, 368-372 : 562 - 564
  • [3] Influence of Sputtering Power and Substrate Temperature on properties of Al2O3-doped ZnO Films
    Yu, Ge
    Liu, Ya
    Hong, Danhong
    Li, Donglin
    Zang, Jianxin
    ADVANCED MATERIALS AND PROCESSES II, PTS 1-3, 2012, 557-559 : 1945 - 1949
  • [4] Electrochemical Characteristics of Al2O3-Doped ZnO Films by Magnetron Sputtering
    Dai, He-Qun
    Xu, Hao
    Zhou, Yong-Ning
    Lu, Fang
    Fu, Zheng-Wen
    JOURNAL OF PHYSICAL CHEMISTRY C, 2012, 116 (01): : 1519 - 1525
  • [5] Ethanol gas sensing properties of Al2O3-doped ZnO thick film resistors
    Patil, D. R.
    Patil, L. A.
    Amalnerkar, D. P.
    BULLETIN OF MATERIALS SCIENCE, 2007, 30 (06) : 553 - 559
  • [6] Ethanol gas sensing properties of Al2O3-doped ZnO thick film resistors
    D. R. Patil
    L. A. Patil
    D. P. Amalnerkar
    Bulletin of Materials Science, 2007, 30 : 553 - 559
  • [7] Distribution and solubility limit of Al in Al2O3-doped ZnO sintered body
    Shirouzu, Keita
    Ohkusa, Takahiro
    Hotta, Mikinori
    Enomoto, Naoya
    Hojo, Junichi
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2007, 115 (1340) : 254 - 258
  • [8] Precipitation of ZnO in Al2O3-doped zinc borate glass ceramics
    Masai, Hirokazu
    Ueno, Takahiro
    Takahashi, Yoshihiro
    Fujiwara, Takumi
    OPTICAL MATERIALS, 2011, 33 (12) : 1980 - 1983
  • [9] Evaluation of the optoelectronic properties and corrosion behavior of Al2O3-doped ZnO films prepared by dc pulsed magnetron sputtering
    Zubizarreta, C.
    Berasategui, E. G.
    Bayon, R.
    Galindo, R. Escobar
    Barros, R.
    Gaspar, D.
    Nunes, D.
    Calmeiro, T.
    Martins, R.
    Fortunato, E.
    Barriga, J.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2014, 47 (48)
  • [10] Radiative Cooling Properties of Al2O3-Doped Colorless Polyimide/Ag Flexible Films
    Liang, Dongdong
    Ren, Jie
    Liu, Huan
    Yang, Yingxin
    Atsha, Ambar
    Sun, Ying
    Wang, Cong
    Kuei Suan Jen Hsueh Pao/Journal of the Chinese Ceramic Society, 2024, 52 (07): : 2175 - 2186
12345