Microstructure and texture in free-standing CVD diamond films

被引：2
|
作者：
Feng, H [1 ]
Zhu, H
Mao, W
Chen, L
Lü, F
机构：
[1] Univ Sci & Technol Beijing, Dept Mat, Beijing 100083, Peoples R China
[2] Univ Sci & Technol Beijing, Inst Funct Mat, Beijing 100083, Peoples R China
来源：
ICOTOM 14: TEXTURES OF MATERIALS, PTS 1AND 2 | 2005年 / 495-497卷
关键词：
diamond film; CVD; microstructure; twinning; EBSD;
D O I：
10.4028/www.scientific.net/MSF.495-497.1365
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Free-standing CVD diamond films were prepared under the substrate temperature in the range of 850-1050 degrees C. Macro- and micro-textures of the films were investigated based on the SEM observation as well as on the ODF and EBSD analysis. It was found that certain growth selection process appeared during diamond deposition which, however, did not lead to a strong film texture. It is indicated that strong fluctuation of growth ratio V-< 100 >/V-< 111 > and frequent growth twinning during film deposition resulted in randomization effect of grain orientations, which can be transformed by adjusting the parameters of film preparation.
引用
收藏
页码：1365 / 1369
页数：5
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