Materials properties of ZnO/diamond-like carbon (DLC) nanocomposite fabricated with different source of targets

被引：10
|
作者：
Foong, Y. M. [1 ]
Koh, A. T. T. [1 ]
Lim, S. R. [1 ]
Hsieh, J. [1 ]
Chua, D. H. C. [1 ]
机构：
[1] Natl Univ Singapore, Dept Mat Sci & Engn, Singapore 117574, Singapore
来源：
DIAMOND AND RELATED MATERIALS | 2012年 / 25卷
关键词：
Zinc oxide/diamond-like carbon nanocomposite; Microstructure; Optical and mechanical properties; Laser ablation; CHEMICAL-VAPOR-DEPOSITION; ZNO THIN-FILMS; LASER; GROWTH; NANOSTRUCTURES;
D O I：
10.1016/j.diamond.2012.02.018
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Zinc oxide/diamond-like carbon (ZnO/DLC) nanocomposite films were grown using two different composite targets, namely zinc/carbon (Zn/C) and zinc oxide/carbon (ZnO/C) targets with pulsed laser deposition technique as a comparison. In both cases, transmission electron microscopy (TEM) confirmed that ZnO nanoclusters were formed embedded in an amorphous carbon matrix. Interestingly, only films obtained from ZnO/C targets yielded monochromatic UV (similar to 378 nm) emission peaks in photoluminescence. X-ray photoelectron spectroscopy (XPS) revealed that a higher fraction of O-2(-) ions in oxygen-rich ZnO was formed in ZnO/DLC films prepared by ZnO/C targets but with a consistently lower sp(3) content. As such, the hardness of the films decreased. However, the formation of SiC due to the deposition process improved the adhesion strength of the films, as evidenced by experimental data. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：103 / 110
页数：8
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